Laplace ALD VEGA Automation System LAA3000/00
Laplace ALD VEGA Automation System LAA3000/00

Laplace plasma enhanced atomic layer deposition horizontal coating automatic loading and unloading system is an online fully automatic loading and unloading system, with AGV docking and MES and other optional functions.

You can consult through the following phone or email
Sales E-mail:sales@laplace-tech.cn
Contact Number:0755-28329695 (曲先生)
  • Product Description
  • Data and Pictures

Application characteristics


This device adopts the method of horizontal tape flow, no plugging and scratching, suitable for the production of 210mm large silicon wafers, which can help customers improve the battery yield.

拉普拉斯等离子体增强原子层沉积水平镀膜自动上下料系统 LAA3000/00

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