Laplace diffusion/LPCVD automatic loading and unloading system LLA8000/LLA15000
Laplace diffusion/LPCVD automatic loading and unloading system LLA8000/LLA15000

Laplace diffusion/LPCVD automatic loading and unloading system is an online fully automatic loading and unloading system, with online square resistance detection, AGV docking and MES and other optional functions

You can consult through the following phone or email
Sales E-mail:sales@laplace-tech.cn
Contact Number:0755-28329695 (曲先生)
  • Product Description
  • Data and Pictures

Application characteristics


This equipment uses 6-axis robot to transport quartz boat, which has high reliability and more flexibility. This equipment has two models: one for one LLA8000/00 and one for two LLA15000/00, suitable for different production lines and investment needs of customers.


拉普拉斯石英舟自动上下料系统


拉普拉斯石英舟自动上下料系统


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