Diffusion furnace Pindola ™ series PRX300 for silicon-based semiconductor devices
Diffusion furnace Pindola ™ series PRX300 for silicon-based semiconductor devices
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Sales E-mail：sales@laplace-tech.cn
  • Product Description
  • Data and Pictures

Technical Parameters:

    1.  Available process tube outer diameter: 2-8 inches

    2.  Number of process pipes that can be equipped: 1-5 pipes/set

    3.  Working temperature range: 400-1280℃

    4.  Length and accuracy of constant temperature zone: 300-1100mm 800-1280℃±0.5℃

    5.  Single point temperature stability: 800-1280℃±0.5℃/24h

    6.  Maximum controllable heating rate: 20℃/min

    7.  Maximum cooling rate: 5℃/min


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